不同气体流量比对Cu/a-C∶H复合薄膜结构及摩擦学性能的影响

doi:10.13251/j.issn.0254-6051.2021.02.017

金属热处理 ›› 2021, Vol. 46 ›› Issue (2): 100-104.DOI: 10.13251/j.issn.0254-6051.2021.02.017

不同气体流量比对Cu/a-C∶H复合薄膜结构及摩擦学性能的影响

孟杰, 田林海, 刘颖, 周兵, 吴玉程, 于盛旺, 吴艳霞

太原理工大学新型碳材料研究院, 山西太原 030024

收稿日期:2020-07-23 出版日期:2021-02-25 发布日期:2021-05-08
通讯作者: 吴艳霞,副教授,博士,E-mail:haifengwuyu@126.com
作者简介:孟杰(1992—),男,硕士研究生,主要研究方向为碳基薄膜的制备及其性能,E-mail:354387884@qq.com。
基金资助:
国家自然科学基金(51505318,51801133);山西省科技重大专项(20181102013);山西省“1331工程”工程研究中心项目(PT201801)

Effects of different gas flow ratio on structure and tribological properties of Cu/a-C∶H films

Meng Jie, Tian Linhai, Liu Ying, Zhou Bing, Wu Yucheng, Yu Shengwang, Wu Yanxia

Institute of New Carbon Materials, Taiyuan University of Technology, Taiyuan Shanxi 030024, China

Received:2020-07-23 Online:2021-02-25 Published:2021-05-08

摘要/Abstract

摘要： 采用磁控溅射技术结合等离子体气相沉积技术,通过调节CH₄与Ar的气体流量比例,获得了不同Cu含量的Cu/a-C∶H复合薄膜。采用XPS、Raman等表征方法分析了不同气体流量比对Cu在复合薄膜中的存在形式及薄膜结构的影响,利用纳米压痕仪测量了复合薄膜的硬度与弹性模量,采用往复式摩擦磨损试验机、白光干涉仪、FESEM等分析了复合薄膜在空气中的摩擦学性能及相关机理。结果表明:随着CH₄在混合气体中所占比例增加,复合薄膜中sp²C含量升高,Cu含量降低,Cu晶粒的尺寸变小,复合薄膜的硬度逐渐升高,韧性降低。CH₄气体流量比为60%、Cu含量为 6.68at%的复合薄膜具有较高的硬度、良好的韧性以及在空气中最低的摩擦因数(0.091)与磨损率(1.77×10^-6 mm³·N^-1·m^-1),这与复合薄膜中sp²C含量及Cu纳米粒子的尺寸和含量有关。

关键词: Cu/a-C∶H复合薄膜, 气体流量比, 力学性能, 摩擦学性能

Abstract: Cu/a-C∶H thin films with different Cu contents were prepared by using magnetron sputtering technology combined with plasma vapor deposition technology with adjusting the gas flow ratio of CH₄ and Ar. The effects of gas flow ratio on the existence form of Cu and on the structure of the composite films were analyzed by XPS, Raman and other characterization methods. The hardness and elastic modulus of the composite films were measured by nano indentation. The tribological properties and related mechanisms of the composite films in air were analyzed by reciprocating friction and wear tester, white-light interferometry and FESEM. The results show that with the increase of CH₄ proportion in the mixed gas, the sp²C content in the composite films increases, the content and grain size of Cu decrease, and the hardness of the composite films increases gradually, while the toughness decreases. Additionally, when the CH₄ gas flow ratio is 60% and Cu content is 6.68at%, the composite films are of high hardness, good toughness, and the lowest friction coefficient (0.091) and wear rate (1.77×10^-6 mm³·N^-1·m^-1) in air, which are related to the content of sp²C and the size and content of Cu nanoparticles in the composite films.

Key words: Cu/a-C∶H composite films, gas flow ratio, mechanical properties, tribological properties

中图分类号:

TG174.442

孟杰, 田林海, 刘颖, 周兵, 吴玉程, 于盛旺, 吴艳霞. 不同气体流量比对Cu/a-C∶H复合薄膜结构及摩擦学性能的影响[J]. 金属热处理, 2021, 46(2): 100-104.

Meng Jie, Tian Linhai, Liu Ying, Zhou Bing, Wu Yucheng, Yu Shengwang, Wu Yanxia. Effects of different gas flow ratio on structure and tribological properties of Cu/a-C∶H films[J]. Heat Treatment of Metals, 2021, 46(2): 100-104.

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不同气体流量比对Cu/a-C∶H复合薄膜结构及摩擦学性能的影响

Effects of different gas flow ratio on structure and tribological properties of Cu/a-C∶H films

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