溅射靶材用Cr20Ni80合金管材的微观组织与再结晶退火

doi:10.13251/j.issn.0254-6051.2022.11.002

金属热处理 ›› 2022, Vol. 47 ›› Issue (11): 12-19.DOI: 10.13251/j.issn.0254-6051.2022.11.002

溅射靶材用Cr20Ni80合金管材的微观组织与再结晶退火

段旭斌¹, 吴宇宁², 袁志钟¹, 王梦飞¹, 卿海标², 钟成铭², 罗锐¹, 程晓农¹

1.江苏大学材料科学与工程学院, 江苏镇江 212013;
2.南京达迈科技实业有限公司, 江苏南京 211102

收稿日期:2022-05-17 修回日期:2022-08-20 出版日期:2022-11-25 发布日期:2023-01-04
通讯作者: 袁志钟,副教授,博士,E-mail:yzzjs@ujs.edu.cn
作者简介:段旭斌(1997—),男,硕士研究生,主要研究方向为中碳合金钢的热处理,E-mail:2459482899@qq.com。
基金资助:
江苏省成果转化项目(BA2018030)

Microstructure and recrystallization annealing of Cr20Ni80 alloy pipe used for sputtering target

Duan Xubin¹, Wu Yuning², Yuan Zhizhong¹, Wang Mengfei¹, Qin Haibiao², Zhong Chengming², Luo Rui¹, Cheng Xiaonong¹

1. School of Materials Science and Engineering, Jiangsu University, Zhenjiang Jiangsu 212013, China;
2. Nanjing Damai Science & Technology Industry Co., Ltd., Nanjing Jiangsu 211102, China

Received:2022-05-17 Revised:2022-08-20 Online:2022-11-25 Published:2023-01-04

摘要/Abstract

摘要： 对溅射靶材用Cr20Ni80合金冷轧管材的微观组织和再结晶退火工艺进行了研究。首先观察了冷轧管材轴向与径向的微观组织变化;其次利用JMatPro计算了Cr20Ni80合金的相图,并设计了再结晶退火工艺;最后对冷轧管材进行了再结晶退火试验,表征了退火后管材的微观组织、晶粒尺寸和硬度。结果表明,冷轧管材沿轴向均为拉长晶,且存在大量孪晶;管材沿径向的微观组织中晶粒尺寸因形变量的增大而减小;当再结晶退火温度为690 ℃时,冷轧管材试样已开始发生再结晶;790 ℃×30 min时,形变晶粒已完全再结晶,平均晶粒尺寸为24.1 μm,为最优再结晶退火工艺;当退火温度进一步升高、保温时间进一步延长时,再结晶晶粒逐渐长大;试样的硬度随退火温度的升高而减小。

关键词: 溅射靶材, Cr20Ni80合金, 再结晶退火, 微观组织, 硬度

Abstract: Microstructure and recrystallization annealing process of cold-rolled Cr20Ni80 alloy pipe used for sputtering target were studied. Firstly, the microstructure variation along the axial and radial directions of the cold-rolled pipe was observed. Secondly, the phase diagram of the Cr20Ni80 alloy was calculated by JMatPro and the recrystallization annealing process was designed. Finally, the recrystallization annealing processes were carried out and the microstructure, grain size and hardness were characterized. The results show that the microstructure of the cold-rolled pipe along the axial direction is all elongated crystals, and there are a lot of twins. The grain size of the pipe along the radial direction decreases due to the increase of deformation. The cold-rolled pipe begins to recrystallize when the recrystallization annealing temperature is 690 ℃. The deformed grains have been completely recrystallized at 790 ℃ for 30 min, and the average grain size is 24.1 μm, which is the optimal recrystallization annealing process. The recrystallized grains of the specimen gradually grow as the temperature is further increased and the holding time is prolonged. Moreover, the hardness decreases with the increase of annealing temperature.

Key words: sputtering target, Cr20Ni80 alloy, recrystallization annealing, microstructure, hardness

中图分类号:

TG166.7

段旭斌, 吴宇宁, 袁志钟, 王梦飞, 卿海标, 钟成铭, 罗锐, 程晓农. 溅射靶材用Cr20Ni80合金管材的微观组织与再结晶退火[J]. 金属热处理, 2022, 47(11): 12-19.

Duan Xubin, Wu Yuning, Yuan Zhizhong, Wang Mengfei, Qin Haibiao, Zhong Chengming, Luo Rui, Cheng Xiaonong. Microstructure and recrystallization annealing of Cr20Ni80 alloy pipe used for sputtering target[J]. Heat Treatment of Metals, 2022, 47(11): 12-19.

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溅射靶材用Cr20Ni80合金管材的微观组织与再结晶退火

Microstructure and recrystallization annealing of Cr20Ni80 alloy pipe used for sputtering target

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