金属钽表面处理工艺进展

doi:10.13251/j.issn.0254-6051.2024.02.041

摘要/Abstract

摘要： 总结归纳了利用渗层、微弧氧化、化学气相沉积、热喷涂等表面处理技术提高金属钽综合性能、减少钽材料失效行为、提升钽设备服役寿命等方面的研究成果和应用实例,最后对钽材料表面增强处理的发展方向进行了展望。

Abstract: Research advances and application examples of surface treatment technologies such as infiltration layer, micro-arc oxidation, chemical vapor deposition, and thermal spraying to improve the comprehensive properties of tantalum metal, reduce the failure behavior of tantalum materials, and enhance the service life of tantalum equipment were summarized. Finally, the development direction of surface reinforcement treatment for tantalum materials was discussed.

Key words: tantalum, rare metal, surface treatment, comprehensive property improvement, service lifetime

中图分类号:

TG166.7

王哲昊. 金属钽表面处理工艺进展[J]. 金属热处理, 2024, 49(2): 259-264.

Wang Zhehao. Advances on surface treatment process of tantalum[J]. Heat Treatment of Metals, 2024, 49(2): 259-264.

参考文献

[1]Purushotham Y, Balaji T, Kumar A, et al. Chemical and physical properties of tantalum powder[J]. Modern Physics Letters B, 2001, 15(20): 867-871.
[2]Stelmakh V, Rinnerbauer V, Geil R D, et al. High-temperature tantalum tungsten alloy photonic crystals: Stability, optical properties and fabrication[J]. Applied Physics Letters, 2013, 103(12): 123903-123906.
[3]Brocchi E A, Moura F J. Chlorination methods applied to recover refractory metals from tin slags[J]. Minerals Engineering, 2008, 21(2): 150- 156.
[4]刘世友. 钽在高新技术中的应用[J]. 稀有金属与硬质合金, 1998(2): 55-57, 26.
Liu Shiyou. Applications of tantalum in high-tech[J]. Rare Metals and Cemented Carbides, 1998(2): 55-57, 26.
[5]朱国栋, 王守仁, 成巍, 等. 激光清洗在金属表面处理中的应用研究进展[J]. 山东科学, 2019, 32(4): 38-45, 73.
Zhu Guodong, Wang Shouren, Cheng Wei, et al. Advances in the application of laser cleaning to metal surface treatment[J]. Shandong Science, 2019, 32(4): 38-45, 73.
[6]刘张慧, 胡海洋, 王建刚, 等. 锆合金表面改性工艺的研究进展[J]. 金属热处理, 2022, 47(12): 258-268.
Liu Zhanghui, Hu haiyang, Wang Jiangang, et al. Research progress on surface modification of zirconium alloys[J]. Heat Treatment of Metals, 2022, 47(12): 258-268.
[7]申毅, 薛玉娜, 陈汉, 等. 微弧表面处理对AZ31B镁合金耐腐蚀及耐腐蚀疲劳性能的影响[J]. 金属热处理, 2022, 47(8): 257-265.
Shen Yi, Xue Yuna, Chen Han, et al. Effect of micro-arc surface treatment on corrosion resistance and corrosion fatigue resistance of AZ31B magnesium alloy[J]. Heat Treatment of Metals, 2022, 47(8): 257-265.
[8]陈全训, 高德柱, 赵家生, 等. 中国钽业[M]. 北京: 冶金工业出版社, 2015.
[9]石文, 王煜. 金属钽材表面强化处理[J]. 金属热处理, 2000, 25(5): 27-29.
Shi Wen, Wang Yu. Handering treatment on tantalum surface[J]. Heat Treatment of Metals, 2000, 25(5): 27-29.
[10]程征, 伍喜庆, 杨平伟. 我国钽铌资源的特征及选矿技术[J]. 金属矿山, 2013(7): 97-100.
Cheng Zheng, Wu Xiqing, Yang Pingwei. The characteristics of Ta-Nb resources and its beneficiation technology[J]. Metal Mine, 2013(7): 97-100.
[11]刘建迪, 王静静, 李伟, 等. 钽的提取研究进展[J]. 矿产保护与利用, 2021, 41(2): 163-173.
Liu Jiandi, Wang Jingjing, Li Wei, et al. Research progress of tantalum extraction[J]. Conservation and Utilization of Mineral Resources, 2021, 41(2): 163-173.
[12]Edward C H C O, Hemantha K Y. Multi-length scale modeling of carburization, martensitic microstructure evolution and fatigue properties of steel gears[J]. Journal of Materials Science and Technology, 2020, 49(14): 157-165.
[13]陈治, 李宝奎, 卢金生, 等. 渗氮处理在重载齿轮上的应用进展[J]. 金属热处理, 2023, 48(3): 104-111.
Chen Zhi, Li Baokui, Lu Jinsheng, et al. Application and progress of nitriding treatment in heavy duty gears[J]. Heat Treatment of Metals, 2023, 48(3): 104-111.
[14]唐全红, 庄祥麟, 方金法, 等. 钽及其合金的表面渗碳强化[J]. 稀有金属, 1991(2): 116-119.
[15]郑欣. 提高钽耐蚀性的表面处理法[J]. 稀有金属快报, 2002(4): 21-22.
[16]周喆, 罗文, 张德元, 等. 钽表面非晶层的制备方法[J]. 材料保护, 2002(8): 32-33.
Zhou Zhe, Luo Wen, Zhang Deyuan, et al. Preparation of tantalum amorphous surface layer[J]. Materials Protection, 2002(8): 32-33.
[17]陈嘉林. 基于钽钨合金两段氮碳共渗强化机理研究[D]. 武汉: 武汉理工大学, 2019.
Chen Jialin. Research on strengthening mechanism about two-step ion nitrocarburizing based on tantalum tungsten alloys[D]. Wuhan: Wuhan University of Technology, 2019.
[18]周寰林. 钽表面离子渗碳改性研究[D]. 绵阳: 中国工程物理研究院, 2017.
[19]周寰林, 胡殷, 朱康伟, 等. 钽表面的甲烷等离子渗碳改性技术研究[J]. 真空科学与技术学报, 2018, 38(1): 48-52.
Zhou Huanlin, Hu Yin, Zhu Kangwei, et al. Surface modification of tantalum sheets by methane plasma carburizing[J]. Chinese Journal of Vacuum Science and Technology, 2018, 38(1): 48-52.
[20]李佳, 闫晓东, 杨银, 等. Ta及Ta-W 合金真空渗碳工艺研究[J]. 稀有金属, 2018, 42(9): 925-930.
Li Jia, Yan Xiaodong, Yang Ying, et al. Vacuum carburization process of Ta and Ta-W alloys[J]. Chinese Journal of Rare Metal, 2018, 42(9): 925-930.
[21]惠鹏飞. 间隙原子渗碳法制备金属(Ta、Mo、Ti6Al4V)表面碳化层的组织和性能研究[D]. 西安: 西安理工大学, 2019.
Hui Pengfei. Microstructure and properties of carbide coatings on metal (Ta, Mo, Ti6Al4V) surface prepared by interstitial carburization[D]. Xi'an: Xi'an University of Technology, 2019.
[22]赵鹏飞. 钽制微孔超薄材料离子氮化研究[D]. 太原: 太原理工大学, 2021.
Zhao Pengfei, Plasma nitriding of tantalum microporous ultra-thin materials[D]. Taiyuan: Taiyuan University of Technology, 2021.
[23]李君. 热喷涂技术应用与发展调研分析[D]. 长春: 吉林大学, 2015.
Li Jun. The study on application and development of thermal spray technology[D]. Changchun: Jilin University, 2015.
[24]吕保霞. 铜在钽及掺氮钽表面的粘附性研究[J]. 铸造技术, 2013, 34(6): 711-713.
Lü Baoxia. Research on adhesive of copper coating on surface of tantalum and nitrating tantalum[J]. Foundry Technology, 2013, 34(6): 711-713.
[25]王坤. 离散结构表面复合金属氢分离膜特性研究[D]. 重庆: 重庆大学, 2016.
Wang Kun. Investigation on characteristics of composite metal hydrogen separation membranes with discrete structure surface[D]. Chongqing: Chongqing University, 2016.
[26]王凯凯. Ta10W合金表面ZrB₂-SiC涂层的高温抗氧化机理研究[D]. 沈阳: 东北大学, 2019.
Wang Kaikai. High temperature oxidation resistance of ZrB₂-SiC coating on Ta10W alloy[D]. Shenyang: Northeastern University, 2019.
[27]Zhang Lei, Li Baoe, Zhang Xianlin, et al. Biological and antibacterial properties of TiO₂ coatings containing Ca/P/Ag by one-step and two-step methods[J]. Biomedical Microdevices, 2020, 22(2): 1-8.
[28]刘晋珲. 钛、锆、钽的微弧氧化膜层及其生物摩擦学性能研究[D]. 广州: 暨南大学, 2011.
Liu Jinhui. Micro-arc oxidation films on titanium, zirconium, tantalum and their bio-tribological behaviors[D]. Guangzhou: Jinan University, 2011.
[29]刘玲. 钽钨合金微弧氧化复合膜层制备和摩擦学性能研究[D]. 成都: 电子科技大学, 2022.
Liu Ling. Study on preparation and tribology performance of micro-arc oxidation composite coating on tantalum-tungsten alloy[D]. Chengdu: University of Electronic Science and Technology of China, 2022.
[30]杨海彧, 李争显, 王毅飞. 钽表面微弧氧化陶瓷层的抗氧化性能[J]. 腐蚀与防护, 2015, 36(6): 563-568.
Yang Haiyu, Li Zhengxian, Wang Yifei. Antioxidation of MAO layers on tantalum surface[J]. Corrosion and Protection, 20015, 36(6): 563-568.
[31]李振宗, 薛亚珂, 高华, 等. 微弧氧化和碱处理技术在多孔钽修复兔颅骨缺损中的应用[J]. 中国实验动物学报, 2019, 27(3): 316-322.
Li Zhenzong, Xue Yake, Gao Hua, et al. Application of micro-arc oxidation and NaOH treatment in the repair of rabbit skull defect using bioactive tantalum metal[J]. Acta Laboratorium Animalis Scientia Sinica, 2019, 27(3): 316-322.
[32]石惠君. 医用金属钽微弧氧化电解液对膜层性能影响[D]. 西安: 西安理工大学, 2019.
Shi Huijun. Micro-arc oxidation electrolyte of medical metal tantalum on film performance[D]. Xi'an: Xi'an University of Technology, 2019.
[33]王犇. 电子束3D打印纯Ta及表面功能化处理研究[D]. 西安: 西安理工大学, 2022.
Wang Ben. Surface founctionalization of selective electron beam melting pure tantalum[D]. Xi'an: Xi'an University of Technology, 2022.
[34]王伟强, 王舒月, 于凤云, 等. 纯钽表面微弧氧化“类骨小梁”状多孔涂层的细胞相容性[J]. 表面技术, 2023, 52(4): 363-373.
Wang Weiqiang, Wang Shuyue, Yu Fengyun, et al. Cytocompatibility of "trabecular bone-like" porous coating prepared by micro-arc oxidation on pure tantalum[J]. Surface Technology, 2023, 52(4): 363-373.
[35]王舒月. 纯钽微弧氧化多孔涂层制备及性能表征[D]. 大连: 大连理工大学, 2022.
Wang Shuyue. Preparation and characterization of porous coatings on pure tantalum by micro-arc oxidation[D]. Dalian: Dalian University of Technology, 2022.
[36]周伟, 陈军, 赵永庆, 等. 不同表面处理下Ti-Ta合金丝的力学性能[J]. 表面技术, 2006(5): 12-13.
Zhou Wei, Chen Jun, Zhao Yongqing, et al. Study on the mechanical properties of Ti-Ta alloy wire by different surface processing[J]. Surface Technology, 2006(5): 12-13.
[37]胡可. Ta在NaCl-KCl熔盐中的热腐蚀行为及表面处理的影响[D]. 武汉: 华中科技大学, 2020.
Hu Ke. The hot corrosion behavior of Ta in NaCl-KCl melts and the effects of surface treatments[D]. Wuhan: Huazhong University of Science and Technology, 2020.
[38]解永旭, 包玺芳, 韩鹏, 等. 电容器级钽丝表面锈点形成机制的研究[J]. 粉末冶金工业, 2022, 32(6): 134-138.
Xie Yongxu, Bao Xifang, Han Peng, et al. Study on the formation mechanism of rust point on the surface of capacitor stage tantalum wire[J]. Powder Metallurgy Industry, 2022, 32(6): 134-138.