磁控溅射和多弧离子镀制备Cr涂层Zr-4合金的微观结构和抗高温氧化性能

doi:10.13251/j.issn.0254-6051.2022.07.042

摘要/Abstract

摘要： 为了对比研究磁控溅射和多弧离子镀两种工艺制备的Cr涂层Zr-4合金微观结构和抗高温氧化性能,分别采用直流磁控溅射和多弧离子镀制备了Cr涂层Zr-4合金样品,在空气气氛中开展高温氧化试验研究。结果表明,磁控溅射制备的Cr涂层Zr-4合金样品表面光滑,Cr涂层沿着(211)晶面择优生长,而多弧离子镀制备的Cr涂层Zr-4合金样品表面存在大量的滴液,Cr涂层沿着(110)晶面择优生长。高温氧化试验结果显示,磁控溅射制备的Cr涂层Zr-4合金样品的氧化质量增加约为多弧离子镀的一半,氧化后的微观结构显示磁控溅射制备的样品还有约4 μm厚的残留Cr涂层,且O原子仅仅大量扩散到距表面约8 μm处,而多弧离子镀制备的样品表面Cr涂层全部被氧化,且O原子大量扩散到距样品表面约1 mm深处的Zr-4合金基体中。因此,磁控溅射制备的Cr涂层Zr-4合金具有更好的抗高温氧化性能。

关键词: Cr涂层Zr-4合金, 抗高温氧化性能, 微观结构, 磁控溅射, 多弧离子镀

Abstract: In order to compare the microstructure and high temperature oxidation resistance of Cr-coated Zr-4 alloy prepared by magnetron sputtering and multi-arc ion plating, Cr-coated Zr-4 alloy were prepared by DC magnetron sputtering and multi-arc ion plating, respectively. And the high temperature oxidation resistance was studied in air atmosphere. The results show that the Cr-coated Zr-4 alloy specimen prepared by magnetron sputtering has smooth surface, and the Cr coating grows preferentially along the (211) crystal plane, while there are a lot of droplets on the surface of the Cr-coated Zr-4 alloy specimen prepared by multi-arc ion plating, and the Cr coating grows preferentially along the (110) crystal plane. The results of high-temperature oxidation experiments show that the oxidation mass gain of the Cr-coated Zr-4 alloy specimen prepared by magnetron sputtering is about half of that of the multi-arc ion plating. The oxidized microstructure shows that the specimen prepared by magnetron sputtering still has a residual Cr coating with a thickness of about 4 μm, and the O atoms only diffuse to a distance of about 8 μm from the surface, while the Cr coating of the specimen prepared by multi-arc ion plating was completely oxidized, and a large number of O atoms diffused into the Zr-4 alloy matrix at a depth of about 1 mm from the surface of the specimen. Therefore, the Cr-coated Zr-4 alloy prepared by magnetron sputtering has better high temperature oxidation resistance.

Key words: Cr-coated Zr-4 alloy, high temperature oxidation resistance, microstructure, magnetron sputtering, multi-arc ion plating

中图分类号:

邹旸, 刘世宏. 磁控溅射和多弧离子镀制备Cr涂层Zr-4合金的微观结构和抗高温氧化性能[J]. 金属热处理, 2022, 47(7): 245-252.

Zou Yang, Liu Shihong. Microstructure and high temperature oxidation resistance of Cr-coated Zr-4 alloy prepared by magnetron sputtering and multi-arc ion plating[J]. Heat Treatment of Metals, 2022, 47(7): 245-252.

参考文献

[1]Chen P, Qiu B W, Wu J M, et al. A comparative study of in-pile behaviors of FeCrAl cladding under normal and accident conditions with updated FROBA-ATF code[J]. Nuclear Engineering and Design, 2021, 371: 110889.
[2]Sakamoto K, Miura Y, Ukai S, et al. Development of accident tolerant FeCrAl-ODS fuel cladding for BWRs in Japan[J]. Journal of Nuclear Materials, 2021, 557: 153276.
[3]Ze X, Liu Y L, Wang B. Effect of Weibull parameters and crack distribution on the failure probability of multi-layered SiC cladding[J]. Journal of Nuclear Materials, 2021, 557: 153215.
[4]Yang K, Kardoulaki E, Zhao D, et al. Uranium nitride (UN) pellets with controllable microstructure and phase-fabrication by spark plasma sintering and their thermal-mechanical and oxidation properties[J]. Journal of Nuclear Materials, 2021, 557: 153272.
[5]Liu H Y, Feng Y J, Yao Y R, et al. Effect of the 345 ℃ and 16.5 MPa autoclave corrosion on the oxidation behavior of Cr-coated zirconium claddings in the high-temperature steam[J]. Corrosion Science, 2021, 189: 109608.
[6]Jiang J S, Du M Y, Pan Z Y, et al. Effects of oxidation and inter-diffusion on the fracture mechanisms of Cr-coated Zry-4 alloys: An in situ three-point bending study[J]. Materials and Design, 2021, 212: 110168.
[7]Shin D, Kim S J. Intrinsic effects of Cr-layered accident-tolerant fuel cladding surface on reflood heat transfer[J]. International Journal of Heat and Mass Transfer, 2022, 186: 122512.
[8]Wei T G, Zhang R Q, Yang H Y, et al. Microstructure, corrosion resistance and oxidation behavior of Cr-coatings on Zircaloy-4 prepared by vacuum arc plasma deposition[J]. Corrosion Science, 2019, 158: 108077.
[9]曾小安, 邱长军, 张文, 等. 占空比对多弧离子镀纯Cr涂层表面形貌的影响[J]. 金属热处理, 2017, 42(4): 172-174.
Zeng Xiaoan, Qiu Changjun, Zhang Wen, et al. Influence of duty cycle on surface morphology of pure Cr coatings deposited by multi-arc ion plating[J]. Heat Treatment of Metals, 2017, 42(4): 172-174.
[10]Tang C, Groe M, Ulrich S, et al. High-temperature oxidation and hydrothermal corrosion of textured Cr2AlC-based coatings on zirconium alloy fuel cladding[J]. Surface and Coatings Technology, 2021, 419: 127263.
[11]李涛, 樊湘芳, 胡汝骞, 等. 锆合金表面渗氮层对TiAlN涂层结合力的影响[J]. 金属热处理, 2018, 43(5): 120-123.
Li Tao, Fan Xiangfang, Hu Ruqian, et al. Effect of nitride layer of zirconium alloy on binding of TiAlN coating[J]. Heat Treatment of Metals, 2018, 43(5): 120-123.
[12]Xiao W W, Deng H, Zou S L, et al. Effect of roughness of substrate and sputtering power on the properties of TiN coatings deposited by magnetron sputtering for ATF[J]. Journal of Nuclear Materials, 2018, 509: 542-549.
[13]Li Z, Liu C H, Chen Q S, et al. Microstructure, high-temperature corrosion and steam oxidation properties of Cr/CrN multilayer coatings prepared by magnetron sputtering[J]. Corrosion Science, 2021, 191: 109755.
[14]Liu J K, Hao Z, Cui Z X, et al. Investigation of the oxidation mechanisms of superlattice Cr-CrN/TiSiN-Cr multilayer coatings on Zircaloy substrates under high-temperature steam atmospheres[J]. Corrosion Science, 2021, 192: 109782.
[15]Chen Q S, Liu C H, Zhang R Q, et al. Microstructure and high-temperature steam oxidation properties of thick Cr coatings prepared by magnetron sputtering for accident tolerant fuel claddings: the role of bias in the deposition process[J]. Corrosion Science, 2020, 165: 108378.
[16]Huang J H, Zou S L, Xiao W W, et al. Microstructural evolution of Cr-coated Zr-4 alloy prepared by multi-arc ion plating during high temperature oxidation[J]. Journal of Nuclear Materials, 2022, 562: 153616.
[17]Hazan J, Gauthier A, Pouillier E, et al. Semi-integral LOCA test of cold-spray chromium coated zircaloy-4 accident tolerant fuel cladding[J]. Journal of Nuclear Materials, 2021, 550: 152940.
[18]Kim H G, Yang J H, Kim W J, et al. Development status of accident tolerant fuel for light water reactors in Korea[J]. Nuclear Engineering and Technology, 2016, 48(1): 1-15.
[19]Fazi A, Stiller K, Andren H O, et al. Cold sprayed Cr-coating on optimized ZIRLOTM claddings: The Cr/Zr interface and its microstructural and chemical evolution after autoclave corrosion testing[J]. Journal of Nuclear Materials, 2022, 560: 153505.
[20]Han X, Chen C, Tan Y, et al. A systematic study of the oxidation behavior of Cr coatings on Zry4 substrates in high temperature steam environment[J]. Corrosion Science, 2020, 174: 108826.
[21]Liu J K, Cui Z X, Hao Z, et al. Steam oxidation of Cr-coated Sn-containing zircaloy solid rod at 1000 ℃[J]. Corrosion Science, 2021, 190: 109682.
[22]Chen Q S, Xiang Y, Li Z, et al. Microstructure evolution and adhesion properties of thick Cr coatings under different thermal shock temperatures[J]. Journal of Nuclear Materials, 2021, 417: 127224.
[23]Okamoto H. Supplemental literature review of binary phase diagrams: B-Fe, Cr-Zr, Fe-Np, Fe-W, Fe-Zn, Ge-Ni, La-Sn, La-Ti, La-Zr, Li-Sn, Mn-S, and Nb-Re[J]. Journal of Phase Equilibria and Diffusion, 2016, 37: 621-634.