传感器用离子镀Cr/AlCr(Si)N涂层的组织和反射率

doi:10.13251/j.issn.0254-6051.2022.02.040

摘要/Abstract

摘要： 以Ni-11Cr合金作为基材,采用多弧离子镀工艺在其表面制备Cr/AlCrN与Cr/AlCrSiN涂层,并对其在700~900 ℃温度下进行真空热处理,研究热处理温度及Si元素对Cr/AlCr(Si)N涂层组织和红外反射率的影响。结果表明:真空热处理后两涂层形成了Cr₂O₃与Al₂CrO₃的特征峰,900 ℃热处理后,氧化物晶体结构特征衍射峰明显增加。两种涂层的组织呈柱状形态,在Cr/AlCrN涂层中存在许多hcp-CrN纳米晶;Cr/AlCrSiN涂层中形成了粒径尺寸均匀的hcp-AlN纳米晶。真空热处理温度越高,两个涂层红外稳定反射率越大,Ni扩散系数和热处理温度之间呈现单调增加的变化趋势,Cr/AlCrN涂层具有更优异的低红外稳定反射率,Cr/AlCrSiN涂层具备高的红外稳定反射率。

关键词: 真空热处理, 多弧离子镀, Cr/AlCr(Si)N涂层, 组织, 红外反射率

Abstract: Cr/AlCrN and Cr/AlCrSiN coatings were prepared on the surface of Ni-11Cr alloy by multi-arc ion plating process. The coatings were treated at 700-900 ℃ by vacuum heat treatment. The effects of heat treatment temperature and Si element on microstructure and infrared reflectivity of the Cr/AlCr(Si)N coatings were investigated. The results show that the characteristic peaks of Cr₂O₃ and Al₂CrO₃ are formed in the two coatings after vacuum heat treatment, and the characteristic diffraction peaks of oxide crystal structure increases obviously after heat treatment at 900 ℃. The microstructure of the two coatings are columnar. There are many hcp-CrN nanocrystals in the Cr/AlCrN coating. The hcp-AlN nanocrystals with uniform particle size are formed in the Cr/AlCrSiN coating. The higher the heat treatment temperature is, the higher the infrared reflectivity of the two coatings will be, and the diffusion coefficient of Ni increases monotonically with the increase of heat treatment temperature. The Cr/AlCrN coating has excellent low infrared reflectivity, while the Cr/AlCrSiN coating has higher infrared reflectivity.

Key words: vacuum heat treatment, multi-arc ion plating, Cr/AlCr(Si)N coating, microstructure, infrared reflectivity

中图分类号:

TG174.4

刘利平. 传感器用离子镀Cr/AlCr(Si)N涂层的组织和反射率[J]. 金属热处理, 2022, 47(2): 224-228.

Liu Liping. Microstructure and reflectivity of Cr/AlCr(Si)N coating for sensors[J]. Heat Treatment of Metals, 2022, 47(2): 224-228.

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