溅射镀膜用钛靶材制备工艺研究

高维娜, 党鹏, 付文杰, 张清, 邢秋丽

Research on preparation process of titanium target used for sputtering and coating

Gao Weina, Dang Peng, Fu Wenjie, Zhang Qing, Xing Qiuli

金属热处理 . 2014, (12): 43 -46 . DOI: 10.13251/j.issn.0254-6051.2014.12.010