TiN/TiSiN多层膜高温微动磨损特性
罗杉正1，张晓宇2，袁晓光3，任平第2，刘捍卫1
Fretting wear behavior of TiN/TiSiN multiplayer films at elevated temperature
Luo Shanzheng1, Zhang Xiaoyu2, Yuan Xiaoguang3, Ren Pingdi2, Liu Hanwei1
金属热处理
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2015, (2): 81
-85
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DOI: 10.13251/j.issn.0254-6051.2015.02.017