热处理对Fe84Ga16合金薄膜中内应力的影响
晏建武1,2，彭阿芳1,2，罗亮3，曹清华1,2，张丽玲1,2
Influence of heat treatment on internal stress of Fe84Ga16 alloy film
Yan Jianwu1,2，Peng Afang1,2，Luo Liang3, Cao Qinghua1，Zhang Liling1
金属热处理
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2015, (4): 85
-88
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DOI: 10.13251/j.issn.0254-6051.2015.04.020