磁控溅射TiO2薄膜的相结构转变温度

梅海林，唐立丹，王冰，董国建

Transition temperature of phase structure of TiO2 thin films prepared by magnetron sputtering

Mei Hailin, Tang Lidan, Wang Bing, Dong Guojian

金属热处理 . 2016, (9): 48 -51 . DOI: 10.13251/j.issn.0254-6051.2016.09.010