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Al thin film deposited on 316L stainless steel by DC magnetron sputtering

  

  1. Southwestern Institute of Physics; Sichuan Institute of Materials and Technology; College of Electrical Engineering, University of South China
  • Online:2015-01-26 Published:2015-01-30

Key words:  Al thin film, 316L stainless steel, DC magnetron sputtering, crystallinity, density;residual stress

CLC Number: