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Influence of heat treatment on internal stress of Fe84Ga16 alloy film

  

  1. 1. Jiangxi Province Key Laboratory of Precision Drive and Control; 2.Institute of Micro/Nano Actuation and Control, Nanchang Institute of Technology; 3.School of Aeronautical Manufacturing Engineering, Nanchang Hangkong University
  • Online:2015-04-25 Published:2015-04-29

Key words: Fe-Ga alloy film, magnetron sputtering, annealing, microstructure, internal stress

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