Structures and properties of magnetron co-sputtering Al-Al2O3 composite films

doi:10.13251/j.issn.0254-6051.2016.01.039

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Structures and properties of magnetron co-sputtering Al-Al₂O₃ composite films

1. Faculty of Material Science and Engineering, Kunming University of Science and Technology; 2. Key Lab of Advanced Materials of Yunnan Province

Online:2016-01-25 Published:2016-02-01

Abstract

CLC Number:

TB333

Wang Kailiang1,2, Sun Yong1,2, Guo Zhongzheng1,2, Duan Yonghua1,2, Sun Guoqi1,2. Structures and properties of magnetron co-sputtering Al-Al₂O₃ composite films[J]. HTM, doi: 10.13251/j.issn.0254-6051.2016.01.039.

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Structures and properties of magnetron co-sputtering Al-Al₂O₃ composite films

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