Preparation technology of Ni3Al thin film of intermetallic compounds

doi:10.13251/j.issn.0254-6051.2020.05.036

Abstract

Abstract: By means of DC magnetron co-sputtering, a 500 nm thick Ni₃Al thin film was prepared on the substrate of SiO₂ by one-step method or two-step method. Test results of X-ray diffraction(XRD) and transmission electron microscopy(TEM) show that the (111) oriented intermetallic compound with polycrystalline structure in Ni₃Al thin film prepared by one-step method is better than that by the two-step process. The morphology of Ni-Al alloy thin film and intermetallic compound Ni₃Al thin film after high temperature oxidation was observed by means of metallographic microscope. The results show that the high temperature antioxidant properties of Ni₃Al intermetallic compound films are obviously better than the Ni-Al alloy films.

Key words: Ni₃Al thin film, magnetron sputtering, microstructure, high temperature oxidation resistance

CLC Number:

TG146.2

Wang Ming, Ji Hong, Lu Shuo. Preparation technology of Ni₃Al thin film of intermetallic compounds[J]. Heat Treatment of Metals, 2020, 45(5): 183-186.

References

[1]艾桃桃, 王芬, 陈平. 金属间化合物的制备方法及应用[J]. 稀有金属快报, 2006, 25(1): 5-12.
Ai Taotao, Wang Fen, Chen Ping. Preparations and applications of intermetallic compounds[J]. Rare Metals Letters, 2006, 25(1): 5-12.
[2]王芳卫, 严启伟, 袁鹏, 等. 碳含量对Y-Ni-B-C超导相的形成与临界温度的影响[J]. 物理学报, 1999, 48(S1): 51-56.
Wang Fangwei, Yan Qiwei, Yuan Peng, et al. Effects of carbon content on the formation and critical temperature of Y-Ni-B-C superconductor[J]. Acta Physica Sinica, 1999, 48(S1): 51-56.
[3]胥伟华, 孟祥康, 朱沛臣, 等. Ni₃Al薄膜涂层的制备与性能研究[J]. 材料科学与工程, 2000, 18(1): 11-14.
Xu Weihua, Meng Xiangkang, Zhu Peichen, et al. An investigation into the fabrication and properties of Ni₃Al thin coatings on Ni substrate[J]. Materials Science and Engineering, 2000, 18(1): 11-14.
[4]Caillard D. Yield-stress anomalies and high-temperature mechanical properties of intermetallics and disordered alloys[J]. Materials Science and Engineering: A, 2001, 319-321: 74-83.
[5]Deevi S C, Sikka V K, Liu C T. Processing, properties, and applications of nickel and iron aluminides[J]. Progress in Materials Science, 1997, 42(1-4): 177-192.
[6]Ye H Q. Recent developments in high temperature intermetallics research in China[J]. Intermetallics, 2000, 8(5): 503-509.
[7]Moussa S O, Ei-Gizawy A S, Ei-shall M S. Reactive processing of nanostructured nickel aluminide intermetallics starting from elemental nanopowders[J]. Intermetallics, 2007, 15(8): 1057-1065.
[8]Stoloff N S, Liu C T, Deevi S C. Emerging applications of intermetallics[J]. Intermetallics, 2000, 8(9-11): 1313-1320.
[9]Padmaprabu C, Kuppusami P, Terrance A, et al. Microstructural characterisation of TiAl thin films grown by DC magnetron co-sputtering technique[J]. Materials Letters, 2000, 43(3): 106-113.
[10]Yamakawa K, Trolier-Mckinstry S, Dougherty J P. Preparation of lead zirconate titanate thin films by reactive magnetron co-sputtering[J]. Materials Letters, 1996, 28(4-6): 317-322.
[11]Nilsson D, Wiklund U. A flexible laboratory-scale approach to alloying and tailoring of thin films by single-magnetron co-sputtering[J]. Thin Solid Films, 2004, 467(1/2): 10-15.
[12]De-Almeida P, Schaeublin R, Almazouzi A, et al. Microstructure and growth modes of stoichiometric NiAl and Ni₃Al thin films deposited by r. f.-magnetron sputtering[J]. Thin Solid Films, 2000, 368(1): 26-34.
[13]李义兵, 王小军, 周继承. 磁控共溅射Ni₃Al合金薄膜的微观结构及电阻特性[J]. 功能材料, 2006, 37(1): 40-42.
Li Yibing, Wang Xiaojun, Zhou Jicheng. Microstucture and resistance properties of Ni₃Al alloy thin films by magnetron co-sputtering[J]. Journal of Functional Materials, 2006, 37(1): 40-42.
[14]郭蓉, 宋鸿佳, 张建鹏, 等. 退火温度对磁控溅射氧化钒薄膜结构和光学性能的影响[J]. 金属热处理, 2019, 43(4): 146-148.
Guo Rong, Song Hongjia, Zhang Jiangpeng, et al. Effect of annealing temperature on structure and optical properties of vanadium oxide films by radio frequency magnetron sputtering[J]. Heat Treatment of Metals, 2019, 43(4): 146-148.
[15]吴坤尧, 代闯, 惠晶, 等. 磁控溅射制备CrAlN 薄膜的高温抗氧化性[J]. 金属热处理, 2019, 44(7): 187-189.
Wu Kunyao, Dai Chuang, Hui Jing, et al. High temperature oxidation resistance of CrAlN films prepared by magnetron sputtering[J]. Heat Treatment of Metals, 2019, 44(7): 187-189.

Preparation technology of Ni₃Al thin film of intermetallic compounds

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