Heat Treatment of Metals ›› 2020, Vol. 45 ›› Issue (7): 139-142.DOI: 10.13251/j.issn.0254-6051.2020.07.028

• MATERIALS RESEARCH • Previous Articles     Next Articles

Preparation of graphene nanowalls on tungsten and single crystal silicon plate by thermal treatment of carbon plasma

Cheng Yifei, Luo Fei, Liu Dabo, Zhou Haitao, Tian Ye, Hu Chunwen, Luo Bingwei   

  1. AECC Beijing Institute of Aeronautical Materials, Beijing 100095, China
  • Received:2020-03-13 Online:2020-07-25 Published:2020-09-07

Abstract: The graphene nanowalls were prepared directly on the surface of W metal and monocrystalline Si substrate by plasma thermal treatment. The microstructure and components of the samples were characterized by means of XRD, SEM and Raman spectroscopy, and the surface hardness were tested by using micro vickers hardness tester. The results show that the composite layers deposited on the surface of W and Si substrates are consisting of W2C-WC/graphene and SiC/graphene, respectively, which distribute uniformly. Based on the layer of W2C-WC/graphene, the surface hardness of metal W is 502.95 HV0.01, which increases by 52.54 HV0.01 and 11.6% compared with the pure metal W of 450.41 HV0.01. Based on the layer of SiC/graphene composite layer, the surface hardness of SiC/ graphene is 836.76 HV0.025, which increases by 24.02 HV0.025 and 2.95% compared with that of single crystal Si substrate of 812.74 HV0.025.

Key words: metal W, WC, SiC, plasma, graphene

CLC Number: