Microstructure and reflectivity of Cr/AlCr(Si)N coating for sensors

doi:10.13251/j.issn.0254-6051.2022.02.040

Abstract

Abstract: Cr/AlCrN and Cr/AlCrSiN coatings were prepared on the surface of Ni-11Cr alloy by multi-arc ion plating process. The coatings were treated at 700-900 ℃ by vacuum heat treatment. The effects of heat treatment temperature and Si element on microstructure and infrared reflectivity of the Cr/AlCr(Si)N coatings were investigated. The results show that the characteristic peaks of Cr₂O₃ and Al₂CrO₃ are formed in the two coatings after vacuum heat treatment, and the characteristic diffraction peaks of oxide crystal structure increases obviously after heat treatment at 900 ℃. The microstructure of the two coatings are columnar. There are many hcp-CrN nanocrystals in the Cr/AlCrN coating. The hcp-AlN nanocrystals with uniform particle size are formed in the Cr/AlCrSiN coating. The higher the heat treatment temperature is, the higher the infrared reflectivity of the two coatings will be, and the diffusion coefficient of Ni increases monotonically with the increase of heat treatment temperature. The Cr/AlCrN coating has excellent low infrared reflectivity, while the Cr/AlCrSiN coating has higher infrared reflectivity.

Key words: vacuum heat treatment, multi-arc ion plating, Cr/AlCr(Si)N coating, microstructure, infrared reflectivity

CLC Number:

TG174.4

Liu Liping. Microstructure and reflectivity of Cr/AlCr(Si)N coating for sensors[J]. Heat Treatment of Metals, 2022, 47(2): 224-228.

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