Microstructure and recrystallization annealing of Cr20Ni80 alloy pipe used for sputtering target

doi:10.13251/j.issn.0254-6051.2022.11.002

Abstract

Abstract: Microstructure and recrystallization annealing process of cold-rolled Cr20Ni80 alloy pipe used for sputtering target were studied. Firstly, the microstructure variation along the axial and radial directions of the cold-rolled pipe was observed. Secondly, the phase diagram of the Cr20Ni80 alloy was calculated by JMatPro and the recrystallization annealing process was designed. Finally, the recrystallization annealing processes were carried out and the microstructure, grain size and hardness were characterized. The results show that the microstructure of the cold-rolled pipe along the axial direction is all elongated crystals, and there are a lot of twins. The grain size of the pipe along the radial direction decreases due to the increase of deformation. The cold-rolled pipe begins to recrystallize when the recrystallization annealing temperature is 690 ℃. The deformed grains have been completely recrystallized at 790 ℃ for 30 min, and the average grain size is 24.1 μm, which is the optimal recrystallization annealing process. The recrystallized grains of the specimen gradually grow as the temperature is further increased and the holding time is prolonged. Moreover, the hardness decreases with the increase of annealing temperature.

Key words: sputtering target, Cr20Ni80 alloy, recrystallization annealing, microstructure, hardness

CLC Number:

TG166.7

Duan Xubin, Wu Yuning, Yuan Zhizhong, Wang Mengfei, Qin Haibiao, Zhong Chengming, Luo Rui, Cheng Xiaonong. Microstructure and recrystallization annealing of Cr20Ni80 alloy pipe used for sputtering target[J]. Heat Treatment of Metals, 2022, 47(11): 12-19.

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