HTM ›› 2014, Vol. 39 ›› Issue (2): 65-68.

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Effect of nitrogen flow on microstructure and mechanical properties of (Ti, Al, Si, Cr)N superhard film

  

  1. College of Materials Science and Engineering, Sichuan University
  • Online:2014-02-25 Published:2014-04-22

Key words: magnetron sputtering, (Ti, Al, Si, Cr)N film, superhard film, nitrogen flow

CLC Number: