HTM ›› 2014, Vol. 39 ›› Issue (7): 130-134.DOI: 10.13251/j.issn.0254-6051.2014.07.031

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Influence of distance between target and substrate on morphology and distribution of macroparticles during arc ion plating

  

  1. School of Mechatronic Engineering, Zhengzhou Institute of Aeronautical Industry Management; Engineering Technology Research Center of Aviation Manufacturing and Equipment, University of Henan Province; State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology
  • Online:2014-07-25 Published:2014-07-31

Key words: arc ion plating, film, macroparticles (MPs), distribution

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