Numerical simulation and system optimization of temperature field in silicon carbide vacuum sintering furnace

doi:10.13251/j.issn.0254-6051.2022.06.046

Abstract

Abstract: In order to improve the heating efficiency and temperature uniformity of the heating system of silicon carbide vacuum sintering furnace, the ZSD4.5-1150C vacuum high temperature sintering furnace was used as a reference model, the Ansys Fluent software and DO radiation model were used to simulate the transient temperature distribution of vacuum sintering furnace under no-load condition, and compared with the measured data, the maximum error was within 10%. On this basis, effects of heating rate, diameter of heating tube and distance between heating tubes and effective heating zone on temperature distribution characteristics, and heating efficiency of the heating system were further studied, and the heating system was optimized. The results show that the heating efficiency and temperature uniformity of the heating system can be effectively improved by appropriately increasing the heating rate and the diameter of the heating tube. But the distance between the heating tubes and effective heating zone has little effect on the performance of the heating system. The specific optimization scheme is the heating rate of 9 K/min, the diameter of the heating tube of ø45 mm, and the distance between the heating tubes and the effective heating area of 50 mm. After the optimization, the heating time of the system is reduced by 60 min, the heating efficiency is increased by 30%, and the temperature uniformity meets the process requirements.

Key words: vacuum sintering furnace, numerical simulation, heating efficiency, temperature uniformity, system optimization

CLC Number:

TG155.1⁺6

Xiong Li, Zhang Dengchun, Song Shichu, Chen Lin. Numerical simulation and system optimization of temperature field in silicon carbide vacuum sintering furnace[J]. Heat Treatment of Metals, 2022, 47(6): 259-265.

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