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Key words: DC magnetron sputtering, ZAO films, stainless?steel substrate, sputtering power
CLC Number:
TB333
O484
Yang Huidong,Zhang Cuiyuan，Wang Heshen,Li Shan,Li Xinru,Wu Lang. Effect of sputtering power on properties of ZnO:Al films on stainless steel substrates[J]. HTM, doi: 10.13251/j.issn.0254-6051.2016.07.021.
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URL: http://www.jsrcl.net/EN/10.13251/j.issn.0254-6051.2016.07.021
http://www.jsrcl.net/EN/Y2016/V41/I7/87
