Effect of deposition pressure on microstructure and mechanical properties of pulse-PECVD prepared DLC films
Li Ruiwu, Zhou Yanwen, Li Jianwei, Fan Wei, Guo Yuanyuan, Wu Fayu
Heat Treatment of Metals . 2019, (1): 162 -167 .  DOI: 10.13251/j.issn.0254-6051.2019.01.035