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Effect of deposition pressure on microstructure and mechanical properties of pulse-PECVD prepared DLC films
Li Ruiwu, Zhou Yanwen, Li Jianwei, Fan Wei, Guo Yuanyuan, Wu Fayu
Heat Treatment of Metals . 2019, (
1
): 162 -167 . DOI: 10.13251/j.issn.0254-6051.2019.01.035