Effects of different gas flow ratio on structure and tribological properties of Cu/a-C∶H films

Meng Jie, Tian Linhai, Liu Ying, Zhou Bing, Wu Yucheng, Yu Shengwang, Wu Yanxia

Heat Treatment of Metals . 2021, (2): 100 -104 . DOI: 10.13251/j.issn.0254-6051.2021.02.017