Influence of surface roughness on surface morphology and sputtering performance of magnetron sputtering etched area of pure Cu target

Yang Wenhao, Bao Mingdong, Tang Bin, Wang Yupeng, Zhao Guohua, Wang Shuaikang, Wang Duo

Heat Treatment of Metals . 2021, (8): 230 -235 . DOI: 10.13251/j.issn.0254-6051.2021.08.044