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Effect of pulsed bias duty ratio on structure and properties of TiSiN film
Wei Yongqiang, Gu Yanyang, Zhao Zhongqing, Jiang Zhiqiang
Heat Treatment of Metals . 2022, (
8
): 279 -286 . DOI: 10.13251/j.issn.0254-6051.2022.08.046