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Effect of grain size of magnetron sputtering copper target on sputtering performance and deposition performance
Wang Shuaikang, Tang Bin, Bao Mingdong, Zhan Shangsong, Wang Duo, Yi Chenxi
Heat Treatment of Metals . 2022, (
11
): 261 -265 . DOI: 10.13251/j.issn.0254-6051.2022.11.044