Influence of distance between target and substrate on morphology and distribution of macroparticles during arc ion plating

Wei Yongqiang, Wen Zhenhua, Jiang Zhiqiang, Feng Xianzhang, Tian Xiubo

Heat Treatment of Metals . 2014, (7): 130 -134 . DOI: 10.13251/j.issn.0254-6051.2014.07.031