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Effects of plasma nitriding on microstructure and properties of TiN
thin film
Feng Jun1, 2, Jin Fanya1, Tong Honghui1, Shen Liru1, Dan Min1, Deng Zhi, Lai Xinchun3
Heat Treatment of Metals . 2015, (
2
): 140 -143 . DOI: 10.13251/j.issn.0254-6051.2015.02.030