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Effect of annealing temperature on microstructure and adhesion strength of Ru films deposited by DC magnetron sputtering
Xue Yaping1,3, Ju Hongbo1, Chen Min2, Guo Liping2, Yu Lihua1, Xu Junhua1
Heat Treatment of Metals . 2016, (
6
): 125 -127 . DOI: 10.13251/j.issn.0254-6051.2016.06.028