HTM

Previous Articles     Next Articles

Effects of plasma nitriding on microstructure and properties of TiN thin film

  

  1. 1. Southwestern Institute of Physics; 2. University of South China; 3. Sichuan Institute of Materials and Technology
  • Online:2015-03-02 Published:2015-03-09

Key words: TiN, thin film, plasma nitriding, hardness, abrasive wear resistance

CLC Number: