Effects of different gas flow ratio on structure and tribological properties of Cu/a-C∶H films

doi:10.13251/j.issn.0254-6051.2021.02.017

Abstract

Abstract: Cu/a-C∶H thin films with different Cu contents were prepared by using magnetron sputtering technology combined with plasma vapor deposition technology with adjusting the gas flow ratio of CH₄ and Ar. The effects of gas flow ratio on the existence form of Cu and on the structure of the composite films were analyzed by XPS, Raman and other characterization methods. The hardness and elastic modulus of the composite films were measured by nano indentation. The tribological properties and related mechanisms of the composite films in air were analyzed by reciprocating friction and wear tester, white-light interferometry and FESEM. The results show that with the increase of CH₄ proportion in the mixed gas, the sp²C content in the composite films increases, the content and grain size of Cu decrease, and the hardness of the composite films increases gradually, while the toughness decreases. Additionally, when the CH₄ gas flow ratio is 60% and Cu content is 6.68at%, the composite films are of high hardness, good toughness, and the lowest friction coefficient (0.091) and wear rate (1.77×10^-6 mm³·N^-1·m^-1) in air, which are related to the content of sp²C and the size and content of Cu nanoparticles in the composite films.

Key words: Cu/a-C∶H composite films, gas flow ratio, mechanical properties, tribological properties

CLC Number:

TG174.442

Meng Jie, Tian Linhai, Liu Ying, Zhou Bing, Wu Yucheng, Yu Shengwang, Wu Yanxia. Effects of different gas flow ratio on structure and tribological properties of Cu/a-C∶H films[J]. Heat Treatment of Metals, 2021, 46(2): 100-104.

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